Fabrication of beam structures with micro-scale cross-sections and meso-scale spans
نویسندگان
چکیده
منابع مشابه
Fabrication of beam structures with micro-scale cross-sections and meso-scale spans
To allow testing of micro-scale aerodynamics, a process was created to manufacture beam structures that combine spans of 1 cm with a cross-section of 5 μm by 100 μm. The structural considerations limiting the fabrication of a structure combining macro-scale spans with a micro-scale cross-section are analyzed. Limiting considerations include forces during operation, fluid forces during release, ...
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ژورنال
عنوان ژورنال: Journal of Micromechanics and Microengineering
سال: 2007
ISSN: 0960-1317,1361-6439
DOI: 10.1088/0960-1317/17/12/018